The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 03, 2021

Filed:

Jul. 16, 2020
Applicant:

Dmg Mori Co., Ltd., Yamatokoriyama, JP;

Inventor:

Masayuki Niiya, Isehara, JP;

Assignee:

DMG MORI Co., Ltd., Nara, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01B 11/14 (2006.01); G01D 5/347 (2006.01); G01D 5/38 (2006.01);
U.S. Cl.
CPC ...
G01B 11/002 (2013.01); G01B 11/14 (2013.01); G01D 5/34707 (2013.01); G01D 5/34776 (2013.01); G01D 5/38 (2013.01);
Abstract

In order to provide a small detection device capable of detecting an accurate absolute position with a single head, there is provided a detection device including a head including a light source and a detecting unit configured to receive multiplexed light (interference light) of diffracted light obtained by causing light from the light source to enter first two points residing on ax diffraction grating and being separated from each other by a known distance and diffracted light obtained by causing the light from the light source to enter second two points residing on the diffraction grating, being separated from each other by a known distance, and including at least one point being different from the first two points, wherein the diffraction grating includes a first region between the first two points separated from each other by the known distance and a second region between the second two points separated from each other by the known distance, the first and second regions having at least partially different grating interval lengths, and an absolute position on the diffraction grating is detected based on the multiplexed light (interference light) received by the detecting unit.


Find Patent Forward Citations

Loading…