The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 03, 2021

Filed:

Nov. 09, 2018
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Kumiko Yamazaki, Tokyo, JP;

Yuki Nagamine, Tokyo, JP;

Takeshi Shibahara, Tokyo, JP;

Yuji Umeda, Tokyo, JP;

Junichi Yamazaki, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/58 (2006.01); H01G 4/12 (2006.01); C23C 14/00 (2006.01); C01B 21/082 (2006.01);
U.S. Cl.
CPC ...
C04B 35/58007 (2013.01); C01B 21/0821 (2013.01); C04B 35/58 (2013.01); C04B 35/58014 (2013.01); C23C 14/00 (2013.01); H01G 4/1254 (2013.01); C04B 2235/3208 (2013.01); C04B 2235/3213 (2013.01); C04B 2235/3215 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/3232 (2013.01); C04B 2235/3251 (2013.01); C04B 2235/3258 (2013.01); C04B 2235/46 (2013.01); C04B 2235/768 (2013.01); C04B 2235/77 (2013.01); C04B 2235/95 (2013.01);
Abstract

A metal oxynitride thin film having a perovskite structure, in which the metal oxynitride thin film has a composition represented by a compositional formula ABONwherein α is larger than zero and 0.300 or less, x+α is larger than 2.450, and y is 0.300 or more and 0.700 or less, an AO structure having a layered structure parallel to a plane perpendicular to a c-axis of the perovskite structure and having a composition represented by a general formula AO, and the AO structure is bonded with the perovskite structure and incorporated in the perovskite structure.


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