The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2021
Filed:
Feb. 05, 2019
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/26 (2006.01); C23C 16/455 (2006.01); C01B 32/194 (2017.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C01B 32/194 (2017.08); H01L 21/0262 (2013.01); H01L 21/02422 (2013.01); H01L 21/02425 (2013.01); H01L 21/02433 (2013.01); H01L 21/02527 (2013.01); H01L 21/02587 (2013.01); H01L 21/02664 (2013.01); C01B 2204/02 (2013.01); C01B 2204/22 (2013.01); C23C 16/26 (2013.01);
Abstract
Example embodiments relate to a method of manufacturing graphene structures having nanobubbles. The graphene structure includes a graphene layer on a substrate, the graphene layer having a plurality of convex portions and a band gap that is due to the plurality of convex portions. The method includes preparing the graphene layer on the substrate, and forming the plurality of convex portions on the graphene layer by irradiating a noble gas onto the graphene layer.