The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 03, 2021

Filed:

Aug. 14, 2019
Applicant:

Encite Llc, Burlington, MA (US);

Inventor:

Stephen Alan Marsh, Carlisle, MA (US);

Assignee:

Encite LLC, Burlington, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); H01L 21/00 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H01L 41/113 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81C 1/00158 (2013.01); H01L 41/0973 (2013.01); H01L 41/1138 (2013.01); B81B 2201/032 (2013.01); B81B 2203/0127 (2013.01); B81C 2201/019 (2013.01); B81C 2201/0147 (2013.01);
Abstract

Described is a micro-haptic actuator device that can be fabricated with roll-to-roll MEMS processing techniques. The device includes a first body having a first surface and a second, opposing surface, the body has a chamber defined by at least one interior wall, a piston member disposed in the chamber, physically spaced from the at least one interior wall of the chamber, the piston member having a first surface and a second opposing surface. A membrane layer is disposed over and attached to the first surface of the body, with a portion of the membrane attached to the first surface of the piston member. The device also includes a first electrode supported on a second surface the membrane, and a second body that supports a second electrode, with the second body attached to the second surface of the first body.


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