The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Oct. 27, 2017
Applicant:
Taiyo Yuden Co., Ltd., Tokyo, JP;
Inventors:
Jun Tsutsumi, Tokyo, JP;
Takeshi Sakashita, Tokyo, JP;
Assignee:
TAIYO YUDEN CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H03H 9/02 (2006.01); H03H 9/05 (2006.01); H03H 3/02 (2006.01); H03H 9/56 (2006.01); H03H 9/70 (2006.01);
U.S. Cl.
CPC ...
H03H 9/175 (2013.01); H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/02118 (2013.01); H03H 9/0523 (2013.01); H03H 9/0571 (2013.01); H03H 9/173 (2013.01); H03H 9/568 (2013.01); H03H 9/706 (2013.01); H03H 2003/021 (2013.01);
Abstract
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate and including a penetration hole penetrating therethrough; a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film; and a protective film covering an upper surface of the piezoelectric film, a side surface of the piezoelectric film, and an inner surface of the penetration hole.