The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 27, 2021

Filed:

Sep. 05, 2018
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Hyuneok Shin, Yongin-si, KR;

Hongsick Park, Yongin-si, KR;

Sangwoo Sohn, Yongin-si, KR;

Sangwon Shin, Yongin-si, KR;

Sanggab Kim, Yongin-si, KR;

Shinil Choi, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); C23C 14/04 (2006.01); C23F 1/02 (2006.01); C23F 4/00 (2006.01); H01L 51/56 (2006.01); B05C 21/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); B05C 21/005 (2013.01); C23C 14/042 (2013.01); C23F 1/02 (2013.01); C23F 4/00 (2013.01); H01L 51/001 (2013.01); H01L 51/0097 (2013.01); H01L 51/56 (2013.01); H01L 2251/5338 (2013.01);
Abstract

A mask for thin film deposition includes a first mask which defines an opening, and a second mask on a surface of the first mask, and which defines a plurality of deposition holes and has a multilayer structure, in which the opening and the plurality of deposition holes communicate with each other and provide a passage for a deposition material, a size of each of the plurality of deposition holes is smaller than a size of the opening, and each of the plurality of deposition holes has a shape corresponding to a deposition pattern to be patterned on a substrate.


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