The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Jun. 20, 2018
Screen Holdings Co., Ltd., Kyoto, JP;
Mizuki Osawa, Kyoto, JP;
Hiroshi Ebisui, Kyoto, JP;
Abstract
A substrate processing apparatus includes a connection portion connected to the common piping and having a flow space in its interior, a chemical liquid supplying piping connected to the connection portion, a drain piping connected to the connection portion, and a cleaning liquid supplying piping connected to the connection portion, the connection portion has a plurality of ports aligned along a flow direction of the flow space, and a common port, which, among these ports, is connected to one end of the common piping, is disposed, in regard to the flow direction, between a drain port, which, among these ports, is connected to the drain piping, and a cleaning liquid supplying port, which, among these ports, is connected to the cleaning liquid supplying piping.