The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Aug. 26, 2019
Hitachi Metals, Ltd., Tokyo, JP;
Alexei V. Smirnov, Fort Collins, CO (US);
Hitachi Metals, Ltd., Tokyo, JP;
Abstract
Mass flow controllers and methods for correcting flow inconsistencies associated with parasitic flow of a fluid in mass flow controllers are disclosed. A method includes obtaining a pressure measurement signal of the fluid generated by a pressure sensor and receiving a flow sensor signal of the fluid generated by a flow sensor. An estimated parasitic flow signal is generated using the pressure measurement signal, and the flow sensor signal is accelerated to produce an accelerated flow sensor signal with a bandwidth that is comparable to that of the estimated parasitic flow signal. A corrected flow signal is generated using the accelerated flow sensor signal and the estimated parasitic flow signal to control the mass flow controller.