The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Dec. 05, 2018
Applicant:
Samsung Sdi Co., Ltd., Yongin-si, KR;
Inventors:
Kyung Soo Moon, Suwon-si, KR;
Jaehyun Kim, Suwon-si, KR;
Yoong Hee Na, Suwon-si, KR;
Ran Namgung, Suwon-si, KR;
Hwansung Cheon, Suwon-si, KR;
Seungyong Chae, Suwon-si, KR;
Assignee:
Samsung SDI Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); H01L 21/027 (2006.01); G03F 7/20 (2006.01); H01L 21/3213 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0042 (2013.01); G03F 7/2004 (2013.01); H01L 21/0274 (2013.01); H01L 21/31144 (2013.01); H01L 21/32139 (2013.01);
Abstract
A semiconductor resist composition includes an organometallic compound represented by Formula I and a solvent: wherein L includes at least one alkylene group in the main chain. A pattern may be formed using the composition. The pattern formed by using the semiconductor resist composition may not collapse while having a high aspect ratio.