The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Dec. 27, 2019
Applicant:
Shimadzu Corporation, Kyoto, JP;
Inventor:
Masato Hirade, Kyoto, JP;
Assignee:
Shimadzu Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/04 (2010.01); G01Q 10/06 (2010.01); G01Q 60/02 (2010.01);
U.S. Cl.
CPC ...
G01Q 20/04 (2013.01); G01Q 10/065 (2013.01); G01Q 60/02 (2013.01);
Abstract
A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.