The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Aug. 21, 2019
Invensense, Inc., San Jose, CA (US);
David deKoninck, Brossard, CA;
Varun Subramaniam Kumar, San Jose, CA (US);
Matthew Julian Thompson, Beaverton, OR (US);
Vadim Tsinker, Belmont, CA (US);
Logeeswaran Veerayah Jayaraman, Milpitas, CA (US);
Sarah Nitzan, Palo Alto, CA (US);
Houri Johari-Galle, San Jose, CA (US);
Jongwoo Shin, Pleasanton, CA (US);
Le Jin, Fremont, CA (US);
INVENSENSE, INC., San Jose, CA (US);
Abstract
A microelectromechanical (MEMS) accelerometer has a proof mass and a fixed electrode. The fixed electrode is located relative to the proof mass such that a capacitance formed by the fixed electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The MEMS accelerometer is exposed to heat sources that produce a z-axis thermal gradient in MEMS accelerometer and an in-plane thermal gradient in the X-Y plane of the MEMS accelerometer. The z-axis thermal gradient is sensed with a plurality of thermistors located relative to anchoring regions of a CMOS layer of the MEMS accelerometer. The configuration of the thermistors within the CMOS layer measures the z-axis thermal gradient while rejecting other lateral thermal gradients. Compensation is performed at the accelerometer based on the z-axis thermal gradient.