The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Dec. 09, 2019
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., Munich, DE;
Ihp Gmbh Leibniz-institut Für Innovative Mikroelektronik, Frankfurt an der Oder, DE;
Giannino Dziallas, Berlin, DE;
Lars Zimmermann, Berlin, DE;
Tolga Tekin, Berlin, DE;
Ha Duong Ngo, Berlin, DE;
FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V., München, DE;
IHP GmbH Leibniz-Institut für innovative Mikroelektronik, Frankfurt an der Oder, DE;
Abstract
A sensor device including a deflectable membrane made of a 2D nanomaterial, a first optical waveguide for guiding light, disposed adjacent to the membrane and extending along the surface of the membrane at least in a first section, as well as a measuring device for measuring, within the first section the influence of the membrane on an evanescent wave range of the light guided along the first optical waveguide. The influence of the membrane on the light guided in the optical waveguide, in particular on the evanescent wave range of the light, can be measured interferometrically by detecting phasing differences or phase shifts. This allows for a force-free readout of the membrane deflection. By using very thin 2D nanomaterials, the membrane can also react to very quick changes in force.