The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Oct. 21, 2019
Applicant:
Flusso Limited, Cambridge, GB;
Inventors:
Florin Udrea, Cambridge, GB;
Andrea De Luca, Cambridge, GB;
Claudio Falco, Cambridge, GB;
Ethan Gardner, Kineton, GB;
Syed Zeeshan Ali, Cambridge, GB;
Assignee:
FLUSSO LIMITED, Cambridge, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/68 (2006.01); G01F 1/688 (2006.01); G01F 1/708 (2006.01); G01F 1/69 (2006.01); G01F 15/02 (2006.01); G01F 1/698 (2006.01);
U.S. Cl.
CPC ...
G01F 1/6888 (2013.01); G01F 1/69 (2013.01); G01F 1/7084 (2013.01); G01F 1/698 (2013.01); G01F 15/022 (2013.01);
Abstract
We disclose herein a flow and thermal conductivity sensor comprising a semiconductor substrate comprising an etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the semiconductor substrate and a heating element located within the dielectric membrane. The dielectric membrane comprises one or more discontinuities located between the heating element and an edge of the dielectric membrane.