The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Jun. 06, 2018
Fujikin Incorporated, Osaka, JP;
Takeru Miura, Osaka, JP;
Tomohiro Nakata, Osaka, JP;
Toshiyuki Inada, Osaka, JP;
Kazunari Watanabe, Osaka, JP;
Kenta Kondo, Osaka, JP;
Hidenobu Sato, Osaka, JP;
FUJIKIN INCORPORATED, Osaka, JP;
Abstract
A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.