The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 27, 2021

Filed:

Jul. 19, 2017
Applicant:

Universidade Federal DE Santa Catarina, Florianopolis, BR;

Inventors:

Cristiano Binder, Florianopolis, BR;

Aloisio Nelmo Klein, Florianopolis, BR;

Kaline Pagnan Furlan, Florianopolis, BR;

Pedro Henrique Teshima Shioga, Florianopolis, BR;

Renan Oss Giacomelli, Florianopolis, BR;

Roberto Binder, Joinville, BR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/32 (2006.01); C23C 28/04 (2006.01); C23C 28/02 (2006.01); C23C 16/02 (2006.01); C23C 28/00 (2006.01); C23C 16/26 (2006.01); C23C 8/20 (2006.01); C23C 8/24 (2006.01); H01J 37/32 (2006.01); C23C 8/30 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); H01J 37/36 (2006.01);
U.S. Cl.
CPC ...
C23C 14/32 (2013.01); C23C 8/20 (2013.01); C23C 8/24 (2013.01); C23C 8/30 (2013.01); C23C 14/022 (2013.01); C23C 14/0605 (2013.01); C23C 16/0272 (2013.01); C23C 16/26 (2013.01); C23C 28/00 (2013.01); C23C 28/021 (2013.01); C23C 28/023 (2013.01); C23C 28/046 (2013.01); H01J 37/32862 (2013.01); H01J 37/36 (2013.01); H01J 2237/332 (2013.01);
Abstract

The present invention describes a process for coating conductive component in a plasma reactor and a conductive component coating, wherein the process includes the steps of cleaning, mechanical support deposition, topographic modification by plasma bombardment, chemical support layer deposition and amorphous carbon layer deposition (Diamond-Like Carbon). In one embodiment, the process is in single cycle. The present invention pertains to the fields of Materials Engineering, Physics and Chemistry.


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