The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 27, 2021

Filed:

Mar. 19, 2019
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Asaf Schlezinger, Sunnyvale, CA (US);

Markus J. Stopper, Voerstetten, DE;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 47/91 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); B25J 15/06 (2006.01);
U.S. Cl.
CPC ...
B65G 47/911 (2013.01); B25J 15/0616 (2013.01); H01L 21/67271 (2013.01); H01L 21/6838 (2013.01);
Abstract

An apparatus and method for sorting a plurality of substrates is disclosed. The apparatus includes a sorting unit capable of supporting a plurality of bins, a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis, a plurality of grippers coupled to the rotatable support on a common radius relative to the rotational axis, the grippers positioned to travel along a path above the bins as the rotatable support rotates, and an air nozzle configured to reorient a sorted substrate relative to a stacked substrate in a bin of the plurality of bins when released by one of the grippers into the bin.


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