The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2021

Filed:

May. 13, 2020
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventor:

Ji-hoon Kim, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 27/108 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/7687 (2013.01); H01L 27/10808 (2013.01); H01L 27/10852 (2013.01); H01L 28/90 (2013.01); H01L 27/10814 (2013.01);
Abstract

A semiconductor device includes: a plurality of lower electrodes arranged on a substrate in a first direction, which is parallel to a main surface of the substrate, and a second direction parallel to the main surface of the substrate and perpendicular to the first direction; and a support structure pattern configured to connect the plurality of lower electrodes to each other to support the plurality of lower electrodes, on the substrate and including a plurality of open portions. The plurality of open portions have shapes extending longer in the second direction than in the first direction, and when viewed from inner sides of the plurality of open portions, the plurality of open portions are convex in the first direction and are concave in the second direction.


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