The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2021
Filed:
Mar. 20, 2018
Applicant:
Kurita Water Industries Ltd., Tokyo, JP;
Inventors:
Hiroshi Morita, Tokyo, JP;
Nobuko Gan, Tokyo, JP;
Assignee:
KURITA WATER INDUSTRIES LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/08 (2006.01); C02F 1/00 (2006.01); C02F 1/66 (2006.01); C02F 1/68 (2006.01); C02F 103/34 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); B08B 3/08 (2013.01); C02F 1/008 (2013.01); C02F 1/66 (2013.01); C02F 1/685 (2013.01); C02F 2103/346 (2013.01); C02F 2209/04 (2013.01); C02F 2209/06 (2013.01); C02F 2209/40 (2013.01); C02F 2209/42 (2013.01);
Abstract
A cleaning water supply device includes an ultrapure water line through which ultrapure water flows by a fixed amount, a production unit that produces cleaning water by adding a solute to the ultrapure water line by a fixed amount, a storage tank for the cleaning water, cleaning machines to which the cleaning water is supplied from the storage tank, and a controller that controls the cleaning water production unit so that a water level in the storage tank is in a predetermined range.