The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2021

Filed:

Jul. 01, 2020
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Mun-Ja Kim, Suwon-si, KR;

Ji-Beom Yoo, Seoul, KR;

Soo-Young Kim, Suwon-si, KR;

Hee-Bom Kim, Hwaseong-si, KR;

Hwan-Chul Jeon, Seoul, KR;

Seul-Gi Kim, Suwon-si, KR;

Tae-Sung Kim, Suwon-si, KR;

Dong-Wook Shin, Changwon-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01);
Abstract

A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.


Find Patent Forward Citations

Kim, Mun-Ja. (2021). Apparatus for manufacturing pellicle (U.S. Patent No. 11067887). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11067887

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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