The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2021

Filed:

Feb. 06, 2019
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Matti Liukku, Helsinki, FI;

Anssi Blomqvist, Helsinki, FI;

Ville-Pekka Rytkönen, Klaukkala, FI;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 26/12 (2006.01); G01S 7/481 (2006.01);
U.S. Cl.
CPC ...
G02B 26/101 (2013.01); G02B 26/0858 (2013.01); G01S 7/4817 (2013.01);
Abstract

A scanning microelectromechanical reflector system comprising a mobile reflector mass and a mobile frame mass which surrounds the mobile reflector mass when the reflector plane coincides with the mobile frame plane. The mobile frame mass is suspended from a fixed frame which at least partly surrounds the mobile frame mass when the mobile frame plane coincides with the fixed frame plane. The reflector system further comprises a pair of first torsion beams aligned on a first axis in the mobile frame plane, and one or more first actuation units which can be configured to rotate the reflector mass and the mobile frame mass about the first axis.


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