Electrical connecting apparatus

Abstract

To maintain the horizontalness of a probe card even, if the number of measured DUTs is increased. An electrical connecting apparatus according to the present, disclosure comprises a support member having a lower surface region in which a level part is formed and a wiring board provided adjacent to the lower surface of the support member, and to be connected to a testing device side. The electrical connecting apparatus comprises: a connection unit having multiple connection terminals; a probe substrate electrically connecting multiple probes to the connection terminals; multiple anchors arranged on the upper surface of the probe substrate; and multiple supports functioning as supports between corresponding ones of the anchors and the support member via the wiring board and the connection unit. The anchors and the supports are arranged at positions including: each vertex point of a square; each vertex point of two rectangles having respective two long sides passing through corresponding facing vertex points on one side and corresponding facing vertex points on the other side of the square; and multiple points along a virtual circle centered on the center of the square and having a diameter surrounding each of the rectangles.