The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 20, 2021

Filed:

Mar. 29, 2017
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventor:

Dong-Hoon Lee, Asan-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/70 (2014.01); B23K 26/359 (2014.01); B23K 26/352 (2014.01); B23K 26/066 (2014.01); B23K 26/361 (2014.01); B23K 26/14 (2014.01); B23K 26/00 (2014.01); B23K 26/073 (2006.01); B23K 26/12 (2014.01); B23K 26/16 (2006.01); B23K 26/362 (2014.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01); B23K 101/34 (2006.01);
U.S. Cl.
CPC ...
B23K 26/706 (2015.10); B23K 26/0006 (2013.01); B23K 26/066 (2015.10); B23K 26/0732 (2013.01); B23K 26/127 (2013.01); B23K 26/1464 (2013.01); B23K 26/16 (2013.01); B23K 26/352 (2015.10); B23K 26/355 (2018.08); B23K 26/359 (2015.10); B23K 26/361 (2015.10); B23K 26/362 (2013.01); H01L 51/0017 (2013.01); H01L 51/56 (2013.01); B23K 2101/34 (2018.08); B23K 2101/40 (2018.08); B23K 2103/30 (2018.08);
Abstract

A laser etching apparatus includes a chamber, a laser port, a laser emitter, a particle grabber, and a revolving window module. The chamber is configured to receive a substrate. The laser port is disposed below the chamber in a downward direction. The laser emitter is configured to emit a laser to the substrate disposed within the chamber through the laser port. The particle grabber is disposed within the chamber and includes a body disposed over the laser port. An opening is formed through the body. The opening is configured to pass the laser therethrough. The revolving window module includes a revolving window and a driving part configured to drive the revolving window. The revolving window is disposed between the particle grabber and the laser port.


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