The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Dec. 18, 2017
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Takayoshi Tanaka, Kyoto, JP;
Seiji Ano, Kyoto, JP;
Assignee:
SCREEN Holdings CO., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05F 3/04 (2006.01); H01T 19/04 (2006.01); H01T 23/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05F 3/04 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01); H01T 19/04 (2013.01); H01T 23/00 (2013.01);
Abstract
A static eliminator performs processing of reducing the charge amount of an electrically charged substrate. The static eliminator includes a substrate holder and an ultraviolet irradiator. The substrate holder holds the substrate. The ultraviolet irradiator is capable of irradiating a main surface of the substrate with ultraviolet light in an irradiation amount that differs between a plurality of divided regions of the main surface of the substrate.