The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Feb. 07, 2018
Mitsubishi Electric Corporation, Tokyo, JP;
Kohei Yamashita, Tokyo, JP;
Satoru Ukena, Tokyo, JP;
MITSUBISHI ELECTRIC CORPORATION, Tokyo, JP;
Abstract
An input/output control unit () includes a storage, an input/output controller (), an analog signal input interface (), and a pulse signal input interface (A). The input/output controller () includes a pulse signal input block () to generate a trigger signal, an A/D conversion block () to generate wafer thickness information by analog-to-digital conversion of an analog signal, a logger block () to, in synchronization with the trigger signal, store the wafer thickness information a preset table A in the storage, a counter block () to continuously generate, from the digital signal, count value information indicating a count value and output the generated information, and a logger block () to, in synchronization with the trigger information, store the count value information, in association with the wafer thickness information, in a table TB in the storage ().