The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 13, 2021

Filed:

Mar. 07, 2019
Applicant:

Allegro Microsystems, Llc, Manchester, NH (US);

Inventors:

Bryan Cadugan, Bedford, NH (US);

Paul A. David, Bow, NH (US);

Jason Boudreau, Exeter, NH (US);

William P. Taylor, Amherst, NH (US);

Assignee:

Allegro MicroSystems, LLC, Manchester, NH (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01R 33/00 (2006.01); G01R 33/07 (2006.01); G01L 13/02 (2006.01);
U.S. Cl.
CPC ...
G01R 33/072 (2013.01); G01L 13/025 (2013.01); G01R 33/0005 (2013.01); G01L 9/007 (2013.01);
Abstract

A pressure sensor includes a conductive substrate having a cavity which forms a thin portion that can be deformed by a pressure differential. A magnetic field sensor has at least one coil responsive to a changing coil drive signal and positioned proximate to the thin portion of the substrate that induces eddy currents in the thin portion that generate a reflected magnetic field. Magnetic field sensing elements detect the reflected magnetic field and generate a magnetic field signal. The magnetic field sensor is positioned so that deformation of the thin portion of the substrate causes a distance between the thin portion of the substrate and the magnetic field sensor to change.


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