The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Aug. 13, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Shu-Kwan Lau, Sunnyvale, CA (US);
Mehmet Tugrul Samir, Mountain View, CA (US);
Aaron Miller, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 25/08 (2006.01); C30B 25/14 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
C30B 25/14 (2013.01); C23C 16/4408 (2013.01); C23C 16/45574 (2013.01); C23C 16/45591 (2013.01); C30B 35/00 (2013.01);
Abstract
Embodiments disclosed herein describe a liner assembly including a plurality of individually separated gas passages. The liner assembly provides control of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to the present embodiments.