The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Nov. 29, 2017
Applicant:
Exo Imaging, Inc., Redwood, CA (US);
Inventors:
Yusuf Haque, Woodside, CA (US);
Sandeep Akkaraju, Wellesley, MA (US);
Janusz Bryzek, Oakland, CA (US);
Assignee:
EXO IMAGING INC., Oakland, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01); A61B 8/00 (2006.01); B06B 1/06 (2006.01); G01S 7/52 (2006.01); H01L 41/09 (2006.01); A61B 8/08 (2006.01); A61B 8/14 (2006.01); B06B 1/02 (2006.01); G01S 7/521 (2006.01); G01S 15/89 (2006.01); H01L 41/053 (2006.01);
U.S. Cl.
CPC ...
A61B 8/4494 (2013.01); A61B 8/0883 (2013.01); A61B 8/145 (2013.01); A61B 8/4483 (2013.01); A61B 8/4488 (2013.01); A61B 8/461 (2013.01); A61B 8/488 (2013.01); A61B 8/5207 (2013.01); A61B 8/546 (2013.01); B06B 1/0215 (2013.01); B06B 1/0238 (2013.01); B06B 1/0629 (2013.01); B06B 1/0662 (2013.01); B06B 1/0692 (2013.01); G01S 7/521 (2013.01); G01S 7/52046 (2013.01); G01S 7/52079 (2013.01); G01S 15/8925 (2013.01); H01L 41/053 (2013.01); H01L 41/0805 (2013.01); H01L 41/098 (2013.01); H01L 41/0973 (2013.01); A61B 8/4427 (2013.01); A61B 8/4472 (2013.01); B06B 2201/76 (2013.01);
Abstract
A transceiver includes an array of pMUT elements, where each pMUT element includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode; and a first electrode disposed on the piezoelectric layer. Each pMUT element exhibits one or more modes of vibration.