The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Aug. 01, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Roland Trassl, Giessen, DE;
Roland Trassl, Giessen, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An evaporation apparatus () for depositing material on a flexible substrate () supported by a processing drum () is provided. The evaporation apparatus includes: a first set () of evaporation crucibles aligned in a first line () along a first direction for generating a cloud () of evaporated material to be deposited on the flexible substrate (); and a gas supply pipe () extending in the first direction and being arranged between an evaporation crucible of the first set () of evaporation crucibles and the processing drum (), wherein the gas supply pipe () includes a plurality of outlets () for providing a gas supply directed into the cloud of evaporated material, and wherein a position of the plurality of outlets is adjustable for changing a position of the gas supply directed into the cloud of evaporated material.