The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
May. 17, 2019
Applicant:
Horiba, Ltd., Kyoto, JP;
Inventor:
Makoto Matsuhama, Kyoto, JP;
Assignee:
HORIBA, LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 5/028 (2006.01); H01S 5/00 (2006.01); H01S 5/02 (2006.01); G01N 21/31 (2006.01); H01S 5/34 (2006.01); H01S 5/12 (2021.01); H01S 5/22 (2006.01);
U.S. Cl.
CPC ...
H01S 5/0014 (2013.01); G01N 21/31 (2013.01); H01S 5/0207 (2013.01); H01S 5/028 (2013.01); H01S 5/0217 (2013.01); H01S 5/0287 (2013.01); H01S 5/12 (2013.01); H01S 5/22 (2013.01); H01S 5/3402 (2013.01);
Abstract
In order to form a reflection film on a rear end facet of a waveguide more easily than conventional, by etching a laminated structure formed on a substrate, a plurality of waveguides segmented in a lattice shape are formed, and a reflection film is formed on a surface of each of the waveguides for reflecting light in each of the waveguides.