The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Feb. 15, 2017
Applicant:
Saes Getters S.p.a., Lainate, IT;
Inventors:
Assignee:
Saes Getters S.p.A., Lainate, IT;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 41/20 (2006.01); F04B 37/04 (2006.01); C23C 14/16 (2006.01); F04B 37/14 (2006.01);
U.S. Cl.
CPC ...
H01J 41/20 (2013.01); C23C 14/165 (2013.01); F04B 37/04 (2013.01); F04B 37/14 (2013.01); F05D 2300/133 (2013.01); F05D 2300/134 (2013.01); F05D 2300/611 (2013.01);
Abstract
The present invention relates to cathodes electrodes compositions suitable to provide a pumping mechanism which exhibits an extremely high pumping speed and capacity of noble gas suitable to be used in several vacuum devices as for example sputter ion vacuum pumping systems comprising them as active element.