The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Jan. 30, 2019
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Hideji Naohara, Kyoto, JP;
Takashi Ikeuchi, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 19/18 (2006.01); G05B 19/406 (2006.01); H01L 21/67 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G05B 19/188 (2013.01); G05B 19/406 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67051 (2013.01); H01L 21/67253 (2013.01);
Abstract
A data processing method for processing a plurality of pieces of unit-processing data includes: a reference data changing step of changing reference data (data that is selected from a plurality of pieces of unit-processing data for each unit-element, and to be compared with each piece of unit-processing data); and a reference data extending step of extending new reference data which is the reference data after change by the reference data changing step to a unit-element other than a unit-element for which the reference data has been changed.