The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 06, 2021

Filed:

Sep. 11, 2019
Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventor:

Takeshi Yamane, Tsukuba Ibaraki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G02B 21/04 (2006.01); H04N 5/225 (2006.01); G01N 21/956 (2006.01); G02B 21/26 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0072 (2013.01); G01N 21/956 (2013.01); G02B 21/04 (2013.01); H04N 5/2256 (2013.01); G01N 2021/8822 (2013.01); G01N 2021/95676 (2013.01); G02B 21/26 (2013.01);
Abstract

According to one embodiment, an image acquisition apparatus includes a light source, a stage on which an object to be observed is placed, a reflection mirror reflecting light from the light source and supplying reflected light to a surface of the object placed on the stage, an imaging optical system receiving an optical image from the surface of the object illuminated by the reflected light from the reflection mirror, and a detector detecting the optical image acquired by the imaging optical system. The reflection mirror includes a first portion reflecting light from the light source, and a second portion provided at a position opposite to the first portion with respect to a center of the reflection mirror and through which light from the surface of the object passes.


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