The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 06, 2021

Filed:

Nov. 12, 2019
Applicant:

Trumpf Photonic Components Gmbh, Ulm, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01N 15/02 (2006.01); G01N 15/14 (2006.01); G01S 7/4912 (2020.01);
U.S. Cl.
CPC ...
G01B 9/02092 (2013.01); G01N 15/0227 (2013.01); G01N 15/1429 (2013.01); G01N 15/1434 (2013.01); G01S 7/4916 (2013.01); G01N 2015/1454 (2013.01);
Abstract

A method of measuring a particle density of particles includes emitting, by a laser, a laser beam directed to a mirror, redirecting the laser beam by the mirror with a predetermined periodic movement, and focusing the laser beam to a detection volume by an optical imaging device. The method further includes determining a self mixing interference signal of an optical wave within a laser cavity if the self mixing interference signal is generated by laser light of the laser beam reflected by at least one of the particles and suppressing a false self mixing interference signal for particle detection if the self mixing interference signal is caused by a disturbance in an optical path of the laser beam. The false self mixing signal caused by the disturbance in the optical path of the laser beam is suppressed in a defined range of angles of the mirror during the periodic movement.


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