The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Jan. 09, 2019
Milaebo Co., Ltd., Pyeongtaek-si, KR;
Kyu Hyun Hwang, Osan-si, KR;
Nak Jin Choi, Osan-si, KR;
Tae Yeon Kim, Gangwon-do, KR;
Kyung Tae Kim, Suwon-si, KR;
Che Hoo Cho, Seongnam-si, KR;
MILAEBO CO., LTD., Pyeongtaek-si, KR;
Abstract
Disclosed is an apparatus for collecting a by-product in a semiconductor process, the apparatus including: a housing; a heater plate; a heater power supply unit; first and second upper horizontal brackets collecting a part of a by-product in a powder form; a by-product collecting tower allowing the exhaust gas to pass vertically and collecting a part of the by-product in a powder form; a lower horizontal bracket guiding the exhaust gas toward a window and collecting a part of the by-product in a powder form; the window blocking the powder form by-product from introducing toward a gas collecting and discharging port and guiding the exhaust gas thereto; and the gas collecting and discharging port. Accordingly, the apparatus can increase capacity of collecting by-products with a simple structure, thereby extending a replacement period of the apparatus and collect a large amount of by-products efficiently over a long period of time.