The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Nov. 15, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Mountain View, CA (US);
Biraja P. Kanungo, San Jose, CA (US);
Vahid Firouzdor, San Mateo, CA (US);
Tom Cho, Los Altos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 18/00 (2006.01); C23C 14/08 (2006.01); C23C 14/22 (2006.01); H01J 37/32 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/08 (2013.01); B32B 18/00 (2013.01); C23C 14/083 (2013.01); C23C 14/22 (2013.01); C23C 14/228 (2013.01); C23C 14/34 (2013.01); H01J 37/32477 (2013.01); H01J 37/32495 (2013.01); Y10T 428/24355 (2015.01); Y10T 428/24967 (2015.01); Y10T 428/24975 (2015.01); Y10T 428/265 (2015.01);
Abstract
An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of YAlO, ErO, ErAlO, and a ceramic compound comprising YAlOand a solid-solution of YO—ZrO.