The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 06, 2021

Filed:

Sep. 20, 2017
Applicant:

Kunshan Go-visionox Opto-electronics Co., Ltd., Kunshan, CN;

Inventors:

Weili Li, Kunshan, CN;

Xuliang Wang, Kunshan, CN;

Shuaiyan Gan, Kunshan, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); H01L 23/544 (2006.01); C23C 14/24 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/24 (2013.01); H01L 23/544 (2013.01); H01L 51/0011 (2013.01); H01L 51/0096 (2013.01); H01L 51/56 (2013.01); H01L 2223/54426 (2013.01);
Abstract

A fine metal mask () comprising a pattern region () comprising a plurality of openings; and a plurality of alignment holes () located outside the pattern region (). Also disclosed are a display substrate () and an alignment method for the fine metal mask () for evaporation.


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