The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Jun. 29, 2017
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventor:
Marco Omar Ghidoni, Melzo, IT;
Assignee:
STMICROELECTRONICS S.R.L., Agrate Brianza, IT;
Primary Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01); B81B 7/00 (2006.01); G01L 9/00 (2006.01); G01J 1/42 (2006.01); G01J 5/04 (2006.01); G01J 1/02 (2006.01); G01L 19/06 (2006.01); B81C 1/00 (2006.01); G01D 11/24 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0061 (2013.01); B81B 7/0067 (2013.01); B81C 1/00182 (2013.01); G01J 1/0271 (2013.01); G01J 1/429 (2013.01); G01J 5/04 (2013.01); G01L 9/0054 (2013.01); G01L 13/025 (2013.01); G01L 19/06 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/0292 (2013.01); G01D 11/245 (2013.01);
Abstract
A transducer modulus, comprising: a substrate; a cap on the substrate, defining a chamber; and a sensor modulus in the chamber, integrating a first MEMS transducer facing the chamber, and a second MEMS transducer facing the supporting substrate. The cap has a first opening that forms a path for access of the first environmental quantity exclusively towards a sensitive element of the first transducer, and the supporting substrate has a second opening that forms a path for access of the second environmental quantity exclusively towards a sensitive element of the second transducer.