The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2021
Filed:
Sep. 24, 2012
Applicants:
Imec, Leuven, BE;
Katholieke Universiteit Leuven, K.u. Leuven R&d, Leuven, BE;
Panasonic Corporation, Osaka, JP;
Inventors:
Assignees:
IMEC VZW, Leuven, BE;
Katholieke Universiteit Leuven, KU LEUVEN R&D, Leuven, BE;
Panasonic Corporation, Osaka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C01B 3/34 (2006.01); B01L 3/00 (2006.01); B01L 7/00 (2006.01); B81B 3/00 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B01L 3/502707 (2013.01); B01L 3/502715 (2013.01); B01L 7/52 (2013.01); B81B 3/0081 (2013.01); B81B 7/0087 (2013.01); B01L 2200/147 (2013.01); B01L 2300/0816 (2013.01); B01L 2300/1805 (2013.01); B01L 2300/1883 (2013.01); B81B 2201/051 (2013.01);
Abstract
A micro-fluidic device is described. The micro-fluidic device includes a semiconductor substrate; at least one micro-reactor in the semiconductor substrate; one or more micro-fluidic channels in the semiconductor substrate, connected to the at least one micro-reactor; a cover layer bonded to the semiconductor substrate for sealing the one or more micro-fluidic channels; and at least one through-substrate trench surrounding the at least one micro-reactor and the one or more micro-fluidic channels.