The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 29, 2021

Filed:

Nov. 23, 2017
Applicant:

Commissariat À I'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;

Inventors:

Adrien Gasse, Seyssins, FR;

Sylvie Jarjayes, Sassenage, FR;

Marion Volpert, Sassenage, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/02 (2006.01); H01L 21/768 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76224 (2013.01); H01L 21/02532 (2013.01); H01L 21/76283 (2013.01); H01L 21/76898 (2013.01); H01L 24/80 (2013.01); H01L 25/0657 (2013.01); H01L 2224/80001 (2013.01); H01L 2225/06541 (2013.01);
Abstract

An electronic circuit including a semiconductor substrate having first and second opposite surfaces and electrically-insulating trenches. Each trench includes at least first and second insulating portions made of a first insulating material, extending from the first surface to the second surface, first and second intermediate portions, extending from the first surface to the second surface, made of a first filling material, and a third insulating portion extending from the first surface to the second surface, the first insulating portion being in contact with the first intermediate portion, the second insulating portion being in contact with the second intermediate portion, and the third insulating portion being interposed between the intermediate portions.


Find Patent Forward Citations

Loading…