The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 29, 2021

Filed:

Aug. 29, 2019
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Masafumi Maeda, Kyoto, JP;

Masaki Nishida, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67745 (2013.01); H01L 21/6715 (2013.01); H01L 21/6776 (2013.01); H01L 21/67178 (2013.01); H01L 21/67276 (2013.01); H01L 21/67754 (2013.01);
Abstract

A substrate treating apparatus includes an indexer, a first processing section, a first transport mechanism, a second processing section, a second transport mechanism, a first mount table, a second mount table, and a controller. The first transport mechanism repeatedly performs a first cycle operation composed of three access operations (specifically, a first access operation, a second access operation, and a third access operation). The second transport mechanism repeatedly performs a second cycle operation composed of three access operations (specifically, a fourth access operation, a fifth access operation, and a sixth access operation).


Find Patent Forward Citations

Maeda, Masafumi. (2021). Substrate treating apparatus (U.S. Patent No. 11049749). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11049749

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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