The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Jan. 14, 2016
Hitachi High-tech Corporation, Tokyo, JP;
Shunichi Matsumoto, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
An inspection device has an illuminating optical system for forming an illuminated area on a sample, a converging optical system for converging the light from the sample, and a detector for detecting the light converged by the converging optical system. The converging optical system includes an image forming element that includes a lens group that has divided apertures and is configured so as to form a plurality of images. The detector detects a signal for the images formed by the image forming element. The detector has a plurality of partitions disposed in a matrix, the partitions include first and second pixels, and the images are projected onto the partitions.