The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Jan. 06, 2020
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Ozan Anac, Oakland, CA (US);
Joseph Seeger, Menlo Park, CA (US);
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5762 (2012.01); G01C 19/5733 (2012.01); G01C 19/5747 (2012.01); G01P 15/08 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5762 (2013.01); B81B 3/0051 (2013.01); G01C 19/5733 (2013.01); G01C 19/5747 (2013.01); G01P 15/0802 (2013.01); B81B 2201/0242 (2013.01); B81B 2203/0163 (2013.01);
Abstract
Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2harmonic motion is minimized.