The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Oct. 18, 2018
Applicant:
Encite Llc, Burlington, MA (US);
Inventor:
Stephen A. Marsh, Carlisle, MA (US);
Assignee:
Encite LLC, Burlington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 7/08 (2006.01); B81B 3/00 (2006.01); B81B 7/00 (2006.01); G01R 27/26 (2006.01); B81C 1/00 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81B 3/0072 (2013.01); B81B 3/0086 (2013.01); B81B 7/0006 (2013.01); B81C 1/00111 (2013.01); B81C 1/00158 (2013.01); G01L 7/08 (2013.01); G01L 9/00 (2013.01); G01L 9/0072 (2013.01); G01R 27/2605 (2013.01); B81B 2201/0264 (2013.01);
Abstract
Disclosed is a micro pressure sensor including a plurality of modules that are operative over different ranges of pressure. The modules include a stack of at least two module layers, each module layer including a module body having walls that define a compartment and with the defined compartment partitioned into at least two sub-compartments, a port for fluid ingress or egress disposed in a first wall of the body, with remaining walls of the body being solid walls, a membrane affixed to a first surface of the module body covering the compartment, and an electrode affixed over a surface of the membrane.