The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Aug. 30, 2017
Applicant:
Electro Scientific Industries, Inc., Portland, OR (US);
Inventor:
Jan Kleinert, Portland, OR (US);
Assignee:
Electro Scientific Industries, Inc., Beaverton, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/03 (2006.01); H01S 3/067 (2006.01); H01S 3/10 (2006.01); B23K 26/035 (2014.01); B23K 26/067 (2006.01); H01S 3/00 (2006.01);
U.S. Cl.
CPC ...
B23K 26/03 (2013.01); B23K 26/035 (2015.10); B23K 26/0676 (2013.01); H01S 3/06754 (2013.01); H01S 3/10053 (2013.01); H01S 3/005 (2013.01); H01S 3/0071 (2013.01); H01S 3/06737 (2013.01); H01S 3/06741 (2013.01); H01S 3/1003 (2013.01); Y10T 29/49165 (2015.01);
Abstract
A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support.