The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 22, 2021

Filed:

Mar. 19, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Katsutomo Tsukahara, Shiojiri, JP;

Eiju Hirai, Azumino, JP;

Motoki Takabe, Shiojiri, JP;

Daisuke Yamada, Shiojiri, JP;

Yasuyuki Matsumoto, Azumino, JP;

Shuichi Tanaka, Chino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/053 (2006.01); B41J 2/14 (2006.01); H02N 2/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/047 (2013.01); B41J 2/14233 (2013.01); B41J 2/14274 (2013.01); H01L 41/0533 (2013.01); H02N 2/0085 (2013.01); B41J 2002/14491 (2013.01);
Abstract

A piezoelectric device (an actuator unit) includes the following: a first substrate (a pressure chamber forming substrate, a diaphragm) having a piezoelectric layer and a first wiring conductor (a top electrode layer) that is at least partially stacked on the piezoelectric layer; and a second substrate (a sealing substrate) having a second wiring conductor (a bottom wiring conductor) that faces and is separated from the first wiring conductor (a top electrode layer) and to which an electrical signal different from an electrical signal that is applied to the first wiring conductor (a top electrode layer) is applied. At least one of the first wiring conductor (a top electrode layer) and the second wiring conductor (a bottom wiring conductor) is at least partially covered with an electrically insulating protective layer.


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