The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2021
Filed:
May. 13, 2019
Boe Technology Group Co., Ltd., Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
An embodiment of this disclosure provides a nano-imprinting method, including: applying an imprinting adhesive on a to-be-processed layer of a substrate located in an imprinting chamber; charging the imprinting chamber with a preset gas at a temperature higher than a boiling point of the preset gas, and pressing a nano-imprinting template on the imprinting adhesive; reducing an ambient temperature of the imprinting chamber to a temperature lower than the boiling point of the preset gas and maintaining the temperature for a preset time, such that the preset gas becomes a liquid; irradiating ultraviolet light from a side of the nano-imprinting template away from the imprinting adhesive to cure the imprinting adhesive; raising the ambient temperature of the imprinting chamber to be higher than the boiling point of the preset gas, such that the liquefied preset gas turns back into a gas; and demolding the nano-imprinting template from the imprinting adhesive.