The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 22, 2021

Filed:

Aug. 09, 2018
Applicant:

Olympus Corporation, Tokyo, JP;

Inventor:

Atsushi Doi, Tokyo, JP;

Assignee:

OLYMPUS CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G01N 21/64 (2006.01); H01J 37/28 (2006.01); H01J 37/285 (2006.01);
U.S. Cl.
CPC ...
G02B 21/008 (2013.01); G01N 21/64 (2013.01); G02B 21/00 (2013.01); G02B 21/0036 (2013.01); G02B 21/0072 (2013.01); G02B 21/0076 (2013.01); H01J 37/28 (2013.01); H01J 37/285 (2013.01);
Abstract

A point-spread-function measurement device includes: a scanner that scans two illumination light beams emitted from a light source; an illumination optical system that radiates the two illumination light beams scanned by the scanner onto a sample; a relative-position adjustor that changes a relative irradiation position, in the sample, between the two illumination light beams radiated by the illumination optical system; a detection optical system that detects signal light generated at an overlapping position, in the sample, of the illumination light beams radiated by the illumination optical system; and a calculator that calculates a point spread function based on the signal light detected by the detection optical system and the relative irradiation position between the two illumination light beams when the signal light is detected.


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