The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 22, 2021

Filed:

Mar. 11, 2019
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Pavan Pakala, Mckinney, TX (US);

Indumini Ranmuthu, Plano, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2020.01); G01R 31/28 (2006.01); G01R 1/073 (2006.01); G06F 13/40 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2621 (2013.01); G01R 1/07342 (2013.01); G01R 1/07364 (2013.01); G01R 31/2601 (2013.01); G01R 31/2633 (2013.01); G01R 31/2831 (2013.01); G06F 13/4022 (2013.01);
Abstract

A wafer test probe system, probe card, and method to test back-to-back connected first and second transistors of a wafer. The probe card includes a waveform generator circuit and probe needles to couple the waveform generator circuit to provide a first pulse signal of a first polarity using a body diode of the first transistor to test the second transistor, and to provide a second pulse signal of a second polarity using a body diode of the second transistor to the test the first transistor. One example includes a resistor connected between the waveform generator circuit and one of the probe needles. The probe card includes a probe needle to connect a sense transistor of the wafer to the first transistor during wafer probe testing.


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