The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2021
Filed:
Oct. 18, 2019
Jefferson Science Associates, Llc, Newport News, VA (US);
Wenze Xi, Ellicott City, MD (US);
Rongli Geng, Yorktown, VA (US);
Carl Zorn, Yorktown, VA (US);
Brian J. Kross, Yorktown, VA (US);
Andrew G. Weisenberger, Yorktown, VA (US);
Jack McKisson, Williamsburg, VA (US);
John McKisson, Newport News, VA (US);
JEFFERSON SCIENCE ASSOCIATES, LLC, Newport News, VA (US);
Abstract
A reflective laser-based particle detector for detecting contamination particles moving through a vacuum. Laser light is directed through a vacuum access window in the containment vessel and toward a reflective surface on an inner surface opposite the window. A photonic detector is positioned to monitor reflected laser from the opposite inner surface inside the vessel and is capable of detecting perturbations of the reflected light. The system makes use of optical interferometry techniques embodied as a photonic integrated circuit to detect the particles. The reflective laser-based system can be placed entirely outside the vacuum thereby avoiding the need for breaking the vacuum environment to check for accumulation of contaminant particles.