The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2021
Filed:
Feb. 22, 2018
Toshiba Kikai Kabushiki Kaisha, Tokyo, JP;
Mitsunori Kokubo, Numazu, JP;
Yuki Sugiura, Mishima, JP;
Shigeru Fujiwara, Numazu, JP;
Yuki Hashimoto, Numazu, JP;
Toshiba Kikai Kabushiki Kaisha, Tokyo, JP;
Abstract
According to one embodiment, under a condition that a substrate is installed on a substrate installation unit, a mold is installed on a mold installation unit, and a mask unit is installed in a mask-unit installation unit, a transfer apparatus controls an operation of a mold presser unit so as to press the mold against the substrate, the operation of a first positioning unit so as to position the mask unit with respect to the mold and the operation of an irradiation unit so as to irradiate an uncured material provided on the surface of the substrate with electromagnetic waves of a predetermined wavelength.